A review of nanometer resolution position sensors: operation and performance
- Creator: Fleming, Andrew J.
- Resource Type: journal article
- Date: 2013
Position sensor performance in nanometer resolution feedback systems
- Creator: Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2013
A survey of control issues in nanopositioning
- Creator: Devasia, Santosh , Eleftheriou, Evangelos , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2007